Flexible-substrate Fluxgate Current Sensor Based on MEMS Technology

Flexible MEMS Technology and Shear Stress Sensor Skin

Fabrication of MEMS-based Micro-fluxgate Sensor with Runway-shaped Co-based Amorphous Alloy Core

High-precision magnetic micro-sensor is an interdisciplinary subject of magnetic field measurement techniques and micro-electromechanical systems (MEMS) technology. A micro-fluxgate magnetic sensor based MEMS technology was designed and fabricated in this paper. This device is a micro-magnetic sensor with a symmetric construction, closed magnetic circuits and differential form. A 25μm thick Flu...

A capacitive RF power sensor based on MEMS technology

Wideband 100 kHz–4 GHz power sensors are presented, which are based on sensing the electrostatic force between an RF signal line and a suspended membrane. The electrostatic force, which is proportional to the square of the rms signal voltage and thus to the signal power, results in a displacement of the suspended membrane. This displacement is detected capacitively, allowing the sensing of the ...

Simulation of MEMS Based Flexible Flow Sensor for Biomedical Application

Arterial disease, especially Coronary Artery Disease (CAD) is one of the leading causes of premature morbidity and mortality. During the flow, blood not only interacts with vessel wall mechanically but also chemically which modulates the plaque formation in blood vessel thus leading to coronary artery diseases. Here we propose to simulate a MEMS based flexible flow sensor based on anemometer pr...

Current - Output Fluxgate

The current-output fluxgate may be tuned by using a serial capacitor. Such tuning increases the sensor sensitivity in the situation when the pick-up coil has a low number of turns. We achieved a signal/feedthrough ratio improvement by a factor of 5. The measured parameters fit the simplified theoretical model within 20% deviation